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Denton Vacuum

Desktop Pro

DepositionDenton Vacuum Desktop Pro family
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Provisional entry — research in progress

This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.

Denton Vacuum Desktop Pro is a compact magnetron sputtering system. Denton Vacuum Desktop Pro supports DC and RF sputtering. Denton Vacuum Desktop Pro supports 4-inch substrates.[1][2]

Desktop Pro — Inventory photo
Fig. 01Desktop ProInventory photo[3]

Power

50/60 Hz[3]

Vacuum

High vacuum, 10^-6 torr range[1]

What it is

The Denton Vacuum Desktop Pro is a high-vacuum sputtering platform used for thin-film deposition.[1][5]

The Desktop Pro is a compact magnetron sputtering system for research and development use.[2][1]

How it works

The Desktop Pro supports DC and RF sputtering.[1][4][5][2]

The Desktop Pro uses a confocal arrangement with one or two cathodes, a rotating substrate stage, and process control through a PLC with a touch-screen interface.[1][4][5]

Where it fits in the process flow

The Desktop Pro is used for deposition tasks that include metal films, dielectric films, magnetic films, and co-sputtered layers.[1][4][2]

Applications

The Desktop Pro is used in materials research, product quality and quality assurance, semiconductor failure analysis, and nanotechnology.[1][5][6]

The Desktop Pro is also used for compound semiconductors and for depositing films for opto-electronics, sensors, power devices, energy storage, and other advanced semiconductor applications.[1]

What do the numbers mean?

Power & electrical4

50/60 Hz[3]
Accurate?
Voltage
208 VAC[3]
Accurate?
Single Phase[3]
Accurate?
Deposition mode
DC & RF sputtering[1]
Accurate?

Vacuum & pumping2

Vacuum capability
High vacuum, 10^-6 torr range[1]
Accurate?
Pump-down time
Less than 30 minutes[1]
Accurate?

Wafer handling2

Substrate size
4-inch diameter[1]
Accurate?
Substrate stage
Rotating substrate stage[1]
Accurate?

Dimensions & facilities1

Footprint
Less than 36 inches (914 mm) of desk space[1]
Accurate?

Configuration & options4

Process type
Magnetron sputtering[1]
Accurate?
Confocal configuration with one or two cathodes[1]
Accurate?
Cathodes
Up to two 2.0-inch diameter magnetrons[4]
Accurate?
Applications
Sputtering, materials research, product QC & QA, semiconductor failure analysis, nanotechnology, compound semiconductors[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration50/60 Hz[3]
  • Voltage208 VAC[3]
  • ConfigurationSingle Phase[3]
  • Deposition modeDC & RF sputtering[1]
  • Vacuum capabilityHigh vacuum, 10^-6 torr range[1]
  • Pump-down timeLess than 30 minutes[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What sputtering modes does the Desktop Pro support?

The Desktop Pro supports DC sputtering and RF sputtering.[1][4][5][2]

How many cathodes can the Desktop Pro use?

The Desktop Pro supports one or two cathodes in a confocal configuration.[1][4][5]

What kinds of films can the Desktop Pro deposit?

The Desktop Pro can deposit metal films, dielectric films, and magnetic films, and it can also support co-sputtering.[1][4][2]

Not publicly documented

The following facts about the Desktop Pro are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the Desktop Pro are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the Desktop Pro are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the Desktop Pro are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the Desktop Pro are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the Desktop Pro is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (6)Every fact above is drawn from these public sources
  1. [1]dentonvacuum.com — dentonvacuum.comdentonvacuum.com
  2. [2]CREOL Denton Desktop Pro Sputter - Research Cleanroom — cleanrooms.research.ucf.educleanrooms.research.ucf.edu
  3. [3]Inventory photo
  4. [4]info.dentonvacuum.com — info.dentonvacuum.cominfo.dentonvacuum.com
  5. [5]Desktop Pro Compact, High Performance Sputtering System - TEM — dentonvacuum.com (Mar 26, 2012)web.archive.org
  6. [6]Desktop Pro Sputtering System from Denton Vacuum : Quote, RFQ, Price and Buy — azoquantum.comazoquantum.com
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Last updated Oct 3, 2026.

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