Chroma

7940

Metrology & Inspection Grip Ring Holder or Wafer frame Chroma 7940 family

Research Quality: 40% complete

Chroma 7940 is a wafer chip inspection system for post-diced wafer chip inspection. Chroma 7940 performs simultaneous double side color inspection of wafers. Chroma 7940 can inspect up to 6" wafers in 3 minutes with a throughput of up to 15 msec./chip.^[1]^[2]^[3]

Chroma7940

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Plate 01Chroma Model 7940 Wafer Chip Inspection System
Chroma ATE, Inc. (USA)Watch on YouTube

Wafer size

Grip Ring Holder or Wafer frame

Performance

up to 15 msec./chip^[1]

Optics

25M Color CMOS Camera (top side)^[4]

What it is

The Chroma 7940 is a wafer chip inspection system for metrology and inspection use.^[3]^[2]

The Chroma 7940 is a grip ring holder or wafer frame inspection system.^[4]^[2]

How it works

The Chroma 7940 uses simultaneous double side color inspection, automatic wafer alignment, wafer shape and edge identification, and a defect detection algorithm.^[3]^[1]

The Chroma 7940 uses top side and bottom side 25M color CMOS cameras, LED co-axis lighting, ring lighting, and back lighting.^[4]

Where it fits in the process flow

The Chroma 7940 is used for postdiced wafer chip inspection and upstream or downstream operation.^[1]^[3]

The Chroma 7940 includes auto cassette load ports and wafer mapping for yield analysis.^[4]^[3]

Applications

The Chroma 7940 is used for inspection of VCSEL device packages and chip inspection on wafer frames or grip ring holders.^[4]

The Chroma 7940 is configured for chip sizes from 1.2 mm by 1.2 mm to 3.1 mm by 3.1 mm.^[4]

The Chroma 7940 supports inspection of a 6-inch expanding wafer within an 8-inch inspection area.^[4]^[3]^[1]

What do the numbers mean?

Wafer handling8

Wafer size: Grip Ring Holder or Wafer frame^[4]
Inspection Area: Max 8" for 6" expanding wafer^[4]; Edge Detection (incomplete wafers)^[4]; Auto Cassette Load ports^[4]
Edge Detection: Yes (incomplete wafers)^[4]
Auto Cassette Load ports: Yes^[4]
Wafer Inspection Time: up to 6" wafer in 3 minutes^[1]
Edge Detection (incomplete wafers): Yes^[4]

Optics & imaging14

25M Color CMOS Camera (top side)^[4]; 25M Color CMOS Camera (bottom side)^[4]; Objective lens (programmable):^[4]
2X: 1.28um/pixel (Resolution)^[4]
5X: 0.51um/pixel (Resolution)^[4]
Camera: 25M Color CMOS Camera (top side)^[4]
Camera: 25M Color CMOS Camera (bottom side)^[4]
Objective Lens (programmable): 2X: 1.28um/pixel (Resolution); 5X: 0.51um/pixel (Resolution)^[4]
Resolution: 2X: 1.3μm/pixel; 5X: 0.5μm/pixel^[1]
Magnifications: 2X and 5X^[1]
Top Side Camera: 25M Color CMOS Camera^[4]
Bottom Side Camera: 25M Color CMOS Camera^[4]
Objective Lens (programmable) 2X: 1.28um/pixel (Resolution)^[4]
Objective Lens (programmable) 5X: 0.51um/pixel (Resolution)^[4]

Performance1

Throughput: up to 15 msec./chip^[1]

Control & software2

Industrial Computer (i7 / 32GB RAM / 2TB HD or better)^[4]
Industrial Computer: i7 / 32GB RAM / 2TB HD or better^[4]

Configuration & options16

Chip Size: 1.2mm x 1.2mm - 3.1mm x 3.1 mm^[4]
DUT Package: VCSEL^[4]; Light Source:^[4]; LED Co-Axis Lighting^[4]; Ring Lighting^[4]; Back Lighting^[4]; Auto Focus (correct warpage)^[4]; Auto Rotation^[4]; Customized Algorithm Capability^[4]
Chip Size Range: 1.2mm x 1.2mm - 3.1mm x 3.1mm^[4]
Light Source: LED Co-Axis Lighting , Ring Lighting , Back Lighting^[4]
Auto Focus (correct warpage): Yes^[4]
Auto Rotation: Yes^[4]
Customized Algorithm Capability: Yes^[4]
Defect Detection Rate: >98%^[3]
Minimum Detectable Defect Size: 1.5μm^[1]

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Where are the manuals?

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Not publicly documented

Field notes

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Frequently asked questions

What inspection mode does the Chroma 7940 support?

The Chroma 7940 supports simultaneous double side color inspection.^[3]^[1]^[2]

What wafer area can the Chroma 7940 inspect?

The Chroma 7940 supports a 6-inch expanding wafer within an 8-inch inspection area.^[4]^[3]^[2]

What kind of positioning features does the Chroma 7940 use?

The Chroma 7940 uses automatic wafer alignment, wafer shape and edge identification, auto rotation, and edge detection for incomplete wafers.^[3]^[4]^[2]

Not publicly documented

The following facts about the 7940 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 7940 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 7940 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 7940 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 7940 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 7940 is not on record.
Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources

[1]quantel-global.com — quantel-global.comquantel-global.com
[2]7940 — Chroma | Specs, Sourcing & Service | Waferpedia — waferpedia.comwaferpedia.com
[3]chromaus.com — chromaus.comchromaus.com
[4]inventory listing