Waferpedia

CEE

450 Spin

DepositionCEE 450 Spin family
Research Quality: 50% complete

The CEE 450 Spin is a spin coater. The CEE 450 Spin handles up to 450mm round or 14" x 14" square substrates. The CEE 450 Spin uses internal OS software.[1][2]

450 Spin — Inventory photo
Fig. 01450 SpinInventory photo[1]

Power

208 Voltage[1]

Vacuum

Vacuum[1]

What it is

The CEE 450 Spin is a spin coater in the deposition category. The CEE 450 Spin Coater handles up to 450 mm round substrates or 14 inch by 14 inch square substrates and uses internal OS software.[1][2]

How it works

The CEE 450 Spin supports vacuum chucking and internal software control. The tool includes a touchscreen graphical user interface, recipe control, and automated dispense functions on the related Apogee 450 platform.[1][3][4]

Where it fits in the process flow

General reference — not yet source-verified

A spin coater sits in the front end of wafer processing or laboratory patterning flows where uniform liquid films must be deposited before later thermal or lithographic steps. The tool commonly follows substrate loading and precedes bake, exposure, development, etch, or other downstream processing depending on the process.

Applications

The CEE 450 Spin is used for coating substrates in semiconductor and advanced materials work. The tool is suited to round wafers, square substrates, and other large or unusual substrate geometries within its handling range.[1][4]

What do the numbers mean?

Power & electrical2

208 Voltage[1]
Accurate?
Power
208 Voltage[1]
Accurate?

Vacuum & pumping2

Vacuum[1]
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Vacuum
Vacuum[1]
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Wafer handling1

Maximum substrate size
Up to 450mm round or 14" x 14" square[1]
Accurate?

Control & software2

Uses internal OS software system[1]
Accurate?
Control/software
Uses internal OS software system[1]
Accurate?

Configuration & options5

Up to 450mm round or 14"x14" square[1]
Accurate?
Model
450 Spin[1]
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Make
CEE[1]
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Category
Deposition[2]
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Tool type
Spin coater[1]
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Configuration208 Voltage[1]
  • ConfigurationVacuum[1]
  • Power208 Voltage[1]
  • VacuumVacuum[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

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Frequently asked questions

What substrate sizes can the CEE 450 Spin handle?

The CEE 450 Spin handles up to 450 mm round substrates or 14 inch by 14 inch square substrates.[1][2]

Does the CEE 450 Spin use vacuum chucking?

The CEE 450 Spin uses vacuum.[1][2]

Does the related Apogee 450 platform support recipe control?

The related Apogee 450 platform supports unlimited recipes and unlimited steps, along with recipe loading, running, and editing.[3][4]

Not publicly documented

The following facts about the 450 Spin are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 450 Spin are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 450 Spin are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 450 Spin are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 450 Spin are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 450 Spin is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (4)Every fact above is drawn from these public sources
  1. [1]Inventory photo
  2. [2]waferpedia.com — waferpedia.comwaferpedia.com
  3. [3]COST EFFECTIVE EQUIPMENT APOGEE 450 OPERATION MANUAL Pdf Download | ManualsLib — manualslib.commanualslib.com
  4. [4]Apogee 450 Spin Coater - Benchtop - Cost Effective Equipment — costeffectiveequipment.comcosteffectiveequipment.com
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Last updated Oct 5, 2026.

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