Canon
MAS 8220
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Canon MAS 8220 is an asher for 8-inch wafers. The Canon MAS 8220 is used for photoresist stripping.[1]
What it is
General reference — not yet source-verifiedAshers are specialized semiconductor equipment that remove photoresist layers from wafers using oxygen plasma, operating at low temperature to avoid damage to underlying structures.
Where it fits in the process flow
General reference — not yet source-verifiedIn a semiconductor fabrication line, ashers are used after etch or ion implantation steps where photoresist becomes hardened and must be stripped away cleanly before subsequent processing. The Canon MAS 8220 follows dry-etch equipment or implanters and precedes wet-clean or lithography steps, ensuring the wafer surface is free of organic residues.
What do the numbers mean?
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
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Frequently asked questions
Who manufactures the MAS 8220?
Canon is the manufacturer of the MAS 8220.[1]
Not publicly documented
The following facts about the MAS 8220 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
Fewer than 3 independently cited specifications for the MAS 8220 are on record; the remainder await public documentation.
Answerable by: an OEM datasheet, a cleanroom equipment inventory, or an engineer who operated or installed it
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the MAS 8220 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the MAS 8220 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the MAS 8220 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the MAS 8220 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
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Sources & citations
Sources (1)Every fact above is drawn from these public sources
- [1]Equipment inventory listing
Last updated Oct 4, 2026.
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