Buehler
49 7211
Provisional entry — research in progress
This page was generated automatically from cited public sources and hasn't completed the full research pass yet. Every specification shown carries its source; more detail is added as research completes.
The Buehler 49 7211 is a chemical mechanical polisher (CMP). The Buehler 49 7211 has 1 phase electrical input. The Buehler 49 7211 is specified for 170-264 Vac at 47/63 Hz.[1][2]
What it is
How it works
General reference — not yet source-verifiedCMP tools combine chemical etching with mechanical abrasion to planarize wafer surfaces.
The process uses a rotating platen with a polishing pad and a controlled flow of abrasive slurry.
Where it fits in the process flow
General reference — not yet source-verifiedCMP is used for global planarization at multiple points in semiconductor fabrication.
Typical process steps where CMP is applied include interlayer dielectric planarization and metal damascene polishing.
Applications
General reference — not yet source-verifiedCMP systems are used to planarize silicon wafers and other substrates used in semiconductor device manufacturing.
Applications include oxide polishing, copper polishing, and removing topographic variations on a wafer surface.
What do the numbers mean?
Power & electrical4
- 47/63 Hz[1]
Gas & chemistry1
Configuration & options3
- 170-264 Vac[1]
What does it need to run?
Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.
Where are the manuals?
Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.
Not publicly documented
Field notes
No research found yet — worked with this tool? Share what you know.
Frequently asked questions
Not publicly documented
The following facts about the 49 7211 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 49 7211 are on record.
Answerable by: OEM historical records or a trade-press announcement
No publicly documented variants, configuration options, or revision breakpoints of the 49 7211 are on record.
Answerable by: an OEM product catalog or an engineer who ordered or specified the tool
The control-system platform and OS era of the 49 7211 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the 49 7211 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the 49 7211 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No research found yet — worked with this tool? Share what you know.
Sources & citations
Sources (2)Every fact above is drawn from these public sources
- [1]Inventory photo
- [2]waferpedia.com — waferpedia.comwaferpedia.com
Last updated Oct 7, 2026.
Compare with similar tools
View all →
The Logitech 1 DP 41 is a polisher with 3-phase, 50/60 Hz, 480 V, 12 amp electrical requirements.
The Strasbaugh 100R16 is a 1-spindle grinder/polisher with a DC drive system and 2 motors. The Strasbaugh 100R16 has a 16-inch capacity.
The Lapmaster 12 Benchtop Lapping / Polishing Machine is a bench-mounted single-sided lapping and polishing machine with a 12-inch plate diameter.
