Axcelis
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The Axcelis NV 6200 is an ion implanter used in semiconductor manufacturing. The Axcelis NV 6200 A Ion is a variant of the NV 6200 series of ion implantation equipment. Axcelis is the manufacturer of the NV 6200 and the NV 6200 A Ion implanter.[1][3]
Ion implanters are applied to introduce controlled amounts of dopant impurities into semiconductor wafers for the formation of conductive regions in devices such as transistors, diodes, and memory cells. The Axcelis NV 6200, as an ion implanter, is used for this doping process in the fabrication of integrated circuits.
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| NV 6200 A Ion | — | — | — | waferpedia.com[3] |
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The following facts about the NV 6200 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.
No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the NV 6200 are on record.
Answerable by: OEM historical records or a trade-press announcement
The control-system platform and OS era of the NV 6200 are not on record.
Answerable by: an engineer who operated it or OEM installation records
No publicly documented failure modes or field errata for the NV 6200 are on record.
Answerable by: a field service engineer, process engineer, or maintenance technician
The process node or technology generation of the NV 6200 is not on record.
Answerable by: an OEM datasheet or a fab qualification report
No publicly documented compatible parts, consumables, or accessories for the NV 6200 are on record.
Answerable by: an OEM parts catalog or a service engineer
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Last updated Oct 8, 2026.
The Varian 0216 7696, E 11368072 ESC is an electrostatic chuck (ESC) platen of the ADV-S type, categorized under ion implantation equipment.
The Varian 160 XP is an ion implanter. A variant, the Varian 160 XP Ion, is configured as a 150 mm high-current implanter.