Waferpedia

ASML

2500 40

LithographyWafer tableASML 2500 40 family
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ASML logo
Fig. — Manufacturer logo, not a photo of this toolWikimedia Commons (see file page for license)

Wafer size

Wafer table

Power

missing board and power supplies[1]

Optics

Reticle table[1]

What it is

The ASML 2500 40 is an i-line lithography stepper.[2]

How it works

The ASML 2500 40 was introduced as a productive solution for leading-edge imaging at the .70 micron node.[2]

Where it fits in the process flow

The ASML 2500 40 was positioned for high-volume imaging work in semiconductor production.[2]

Applications

The ASML 2500 40 was used for leading-edge imaging at the .70 micron node.[2]

Why won't it start?

Documented failure modes, common issues, and field considerations.

  • Missing board and power supplies
  • Untested

What do the numbers mean?

Power & electrical1

Parts System
missing board and power supplies[1]
Accurate?

Wafer handling1

Wafer size
Wafer table[1]
Accurate?

Optics & imaging4

Reticle table[1]
Accurate?
HP laser and alignment laser[1]
Accurate?
Illumination type
i-line[2]
Accurate?
Resolution (node)
0.70 µm[2]
Accurate?

Configuration & options5

Main body is complete with:[1]
Accurate?
P-table[1]
Accurate?
Dipod[1]
Accurate?
SCSI hard drive tool with TEP stage boards[1]
Accurate?
Untested[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • Parts Systemmissing board and power supplies[1]

Where are the manuals?

Generated from public-source data on file. Enter your email to access — nothing is published; details are routed privately.

Not publicly documented

Field notes

No research found yet — worked with this tool? Share what you know.

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Frequently asked questions

What is the main purpose of a step-and-repeat lithography system?General reference — not yet source-verified

The purpose is to transfer a circuit pattern from a mask onto a semiconductor wafer repeatedly across the wafer surface, enabling high-volume production of integrated circuits with precise alignment between layers.

What maintenance is typically required for this class of lithography equipment?General reference — not yet source-verified

Regular maintenance includes cleaning and replacing optical components (lenses, mirrors, filters), calibrating alignment systems, monitoring light source intensity and stability, and servicing the precision stage and wafer handling robots.

Not publicly documented

The following facts about the 2500 40 are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 2500 40 are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 2500 40 are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 2500 40 are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • The process node or technology generation of the 2500 40 is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

  • No publicly documented compatible parts, consumables, or accessories for the 2500 40 are on record.

    Answerable by: an OEM parts catalog or a service engineer

Sources & citations

Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]web.archive.org — asml.com (Jan 25, 2006)web.archive.org
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Last updated Oct 1, 2026.

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