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Agilent

7500 A ICP-MS

Precision OpticsAgilent 7500 family
Research Quality: 50% complete

The Agilent / Varian 7500 A is an inductively coupled plasma mass spectrometer (ICP-MS). The Agilent / Varian 7500 A uses a digital drive 27 MHz ICP RF generator and hyperbolic profile quadrupole rods.[1]

7500 A ICP-MS — Inventory photo
Fig. 017500 A ICP-MSInventory photo[1]

What it is

The Agilent 7500 A is an inductively coupled plasma mass spectrometer (ICP-MS) designed for trace element analysis.[1]

How it works

The Agilent 7500 A ICP-MS uses a Peltier-cooled spray chamber to introduce liquid samples into the plasma.[1]

The instrument features a fully automatic, computer-controlled torch position in all three axes and a ShieldTorch System (STS).[1]

The mass analyzer uses hyperbolic profile quadrupole rods driven by a highest-frequency, digitally synthesized 3 MHz RF Quadrupole Driver.[1]

Detection is performed by a simultaneous dual mode detector with an exclusive high-speed amplifier.[1]

Where it fits in the process flow

General reference — not yet source-verified

In semiconductor manufacturing, ICP-MS instruments are used for trace metal analysis to monitor contamination in process chemicals, deionized water, and on wafer surfaces.

What do the numbers mean?

Power & electrical4

High efficiency digital drive 27 MHz ICP RF generator[1]
Accurate?
Highest frequency, digitally synthesized 3 MHz RF Quadrupole Driver[1]
Accurate?
RF generator frequency
27 MHz[1]
Accurate?
RF Quadrupole Driver frequency
3 MHz[1]
Accurate?

Gas & chemistry1

Agilent Active Mass Flow Controllers (AMFC)[1]
Accurate?

Optics & imaging2

Simultaneous dual mode detector with exclusive high-speed amplifier[1]
Accurate?
Detector type
Simultaneous dual mode with high-speed amplifier[1]
Accurate?

Control & software2

Fully automatic, computer controlled torch position in all three axes[1]
Accurate?
Torch position control
Fully automatic, computer controlled in all three axes[1]
Accurate?

Configuration & options8

Peltier-cooled spray chamber[1]
Accurate?
ShieldTorch System (STS)[1]
Accurate?
Hyperbolic profile quadrupole rods[1]
Accurate?
7500 ICP-MSChemstationVer. B.02.01[1]
Accurate?
I-AS Integrated Autosampler for ICP-MS[1]
Accurate?
Brother Printer HL1440[1]
Accurate?
P 9621 D HP Flat Panel Monitor L1702 2Tone TCO99[1]
Accurate?
Spray chamber cooling
Peltier-cooled[1]
Accurate?
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What does it need to run?

Site utility requirements, footprint, and infrastructure needed to install and operate this tool. Sourced from public records.

  • ConfigurationAgilent Active Mass Flow Controllers (AMFC)[1]
  • ConfigurationHigh efficiency digital drive 27 MHz ICP RF generator[1]
  • ConfigurationHighest frequency, digitally synthesized 3 MHz RF Quadrupole Driver[1]
  • RF generator frequency27 MHz[1]
  • RF Quadrupole Driver frequency3 MHz[1]

Where are the manuals?

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Not publicly documented

Field notes

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Not publicly documented

The following facts about the 7500 A ICP-MS are absent from this record as of this revision. First-hand knowledge or a citation closes a gap; every submission is reviewed before publication.

  • No publicly documented production dates or lifecycle milestones (introduction, end of production, EOL) for the 7500 A ICP-MS are on record.

    Answerable by: OEM historical records or a trade-press announcement

  • No publicly documented variants, configuration options, or revision breakpoints of the 7500 A ICP-MS are on record.

    Answerable by: an OEM product catalog or an engineer who ordered or specified the tool

  • The control-system platform and OS era of the 7500 A ICP-MS are not on record.

    Answerable by: an engineer who operated it or OEM installation records

  • No publicly documented failure modes or field errata for the 7500 A ICP-MS are on record.

    Answerable by: a field service engineer, process engineer, or maintenance technician

  • The process node or technology generation of the 7500 A ICP-MS is not on record.

    Answerable by: an OEM datasheet or a fab qualification report

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Sources & citations

Sources (1)Every fact above is drawn from these public sources
  1. [1]Inventory photo
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Last updated Oct 8, 2026.

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