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The Solitec 5110 C is a photoresist spin coater for wafers, masks, and substrates.
The Solitec 5110 CT Spin is a spin developer manufactured by Solitec.
The Solitec FlexiFab is a coater and developer with automated wafer handling, set up for 150 mm (6-inch) wafers.
The Solitec Mask Cleaner is a wet processing tool used for cleaning photomasks in semiconductor manufacturing.