Waferpedia

Tool family

Zygo GPI

Models in this family

  1. The Zygo GPI to Verifire is a laser Fizeau interferometer designed to upgrade classic Zygo GPI systems to the Verifire platform, combining reliable optical metrology with modern imaging and vibration-tolerant technology.

  2. The Zygo GPI XP Interferometer is a phase-modulating interferometer for noncontact measurement of flat or spherical surfaces and transmitted wavefront measurement of optical components.

    Cited variants

    DesignationGenerationVintageChangesSource
    GPI XP/D——The GPI XP/D uses the precision of phase modulation for measurement; it is distinguished from the GPI FlashPhase which uses single-frame acquisition.web.archive.org[1]
  3. The Zygo GPI XP HR is a 4-inch interferometer configured with a Dell PC and Zygo MetroPro software running under Microsoft Windows NT.

All entries

  1. GPIZygo
    CategoryPrecision Optics
    3 specs
  2. GPI 4'' XP 512Zygo
    CategoryPrecision Optics
    3 specs
  3. GPI to VerifireZygo

    The Zygo GPI to Verifire is a laser Fizeau interferometer designed to upgrade classic Zygo GPI systems to the Verifire platform, combining reliable optical metrology with modern imaging and vibration-tolerant technology.

    CategoryPrecision Optics
    7 specs
  4. GPI XPZygo

    The Zygo GPI XP Interferometer is a phase-modulating interferometer for noncontact measurement of flat or spherical surfaces and transmitted wavefront measurement of optical components.

    CategoryPrecision Optics
    10 specs
  5. GPI XP HRZygo

    The Zygo GPI XP HR is a 4-inch interferometer configured with a Dell PC and Zygo MetroPro software running under Microsoft Windows NT.

    CategoryPrecision Optics
    9 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org