Tool family
The MKS Type 253B Exhaust Throttle Valve is a butterfly valve designed to regulate the removal of gas from a vacuum chamber when used with an MKS controller.
The MKS Type 253B Exhaust Throttle Valve is a butterfly valve designed to regulate the removal of gas from a vacuum chamber when used with an MKS controller.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 253B-20-40-1 | — | — | Has Viton flapper seal (sealing butterfly valve), closed leakage < 10^-7 Torr l/sec. Controllable conductance range 0.07 - 24 l/sec. Overall height same but flapper seal present. | nanofab.utah.edu[1] |