Tokyo Electron TE 8401

Models in this family

1. 

   TE 8401
2. TE 8401 Dry

   The Tokyo Electron TE 8401 is a dry etcher for 8-inch wafers, available in single-chamber poly etch and dual-chamber nitride etch configurations.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Single chamber poly etch	—	1997	Single chamber; poly etch; gases He, O2, CF4, HBr, Cl2; EPROM based OS	Equipment inventory listing[1]
   Dual chamber nitride etch	—	—	Dual chamber; nitride etch; gases HBr, Cl2; JDOS OS	Equipment inventory listing[2]
   TE 8401 (poly etch configuration)	—	1997	Single chamber; poly etch; gases He, O2, CF4, HBr, Cl2; EPROM-based OS	Equipment inventory listing[1]
   TE 8401 (nitride etch configuration)	—	—	Dual chamber; nitride etch; gases HBr, Cl2; JDOS OS	Equipment inventory listing[2]

3. TE 8401 Poly

   The Tokyo Electron TE 8401 Poly is a single-chamber poly etcher with two pumps and gas lines for He, O2, CF4, HBr, and CL2.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   TE 8401 (poly etch configuration)	—	1997	Single chamber; poly etch; gases He, O2, CF4, HBr, Cl2; EPROM-based OS	waferpedia.com[3]
   TE 8401 (nitride etch configuration)	—	—	Dual chamber; nitride etch; gases HBr, Cl2; JDOS OS	waferpedia.com[3]

Sources