Waferpedia

Tool family

Tokyo Electron Clean Track ACT 8 Multi Block

Models in this family

  1. The TEL Clean Track ACT 8 Multi Block is a photoresist spin-coater and developer used in semiconductor manufacturing.

    Cited variants

    DesignationGenerationVintageChangesSource
    ACT8 Multi Block 3C/3D——Described as a specific configuration of the ACT8 Multi Block currently running in productionmacquarie.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]macquarie.commacquarie.com