Waferpedia

Tool family

Temescal FCE-2500

Temescal1 entry

The Temescal FCE-2500 is identified in a Temescal spares list as one of the standard deposition systems for which spare parts kits and shields kits are listed.

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Models in this family

  1. FCE-2500

    The Temescal FCE-2500 is a fast-cycle electron beam evaporation system designed for clean-room compatibility and high-throughput deposition.

    Cited variants

    DesignationGenerationVintageChangesSource
    FCE-2500 SN 101-107——Uses shields kit part number 0625-6570-0web.archive.org[1]
    FCE-2500 SN 108 and above——Uses shields kit part number 0625-6570-1web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org