Waferpedia

Tool family

Temescal 3CK

TemescalE-gun1 entry

Temescal Model 3CK SuperSource is a removable-cover multi-pocket electron-beam source rated up to 12 kW.

Models in this family

  1. Temescal Model 3CK SuperSource is a removable-cover multi-pocket electron-beam source rated up to 12 kW.

    Cited variants

    DesignationGenerationVintageChangesSource
    Temescal 3CK——Rated up to 12 kW.web.archive.org[1]
    Temescal 2CK——Rated up to 10 kW.web.archive.org[1]
    Temescal 1CK——Rated up to 8 kW.web.archive.org[1]
    3CK——Rated up to 12 kW; offered with side or bottom drive; available with multiple crucible configurations and removable crucible covers.web.archive.org[1]
    2CK——Referenced as a related Temescal SuperSource model rated up to 10 kW.web.archive.org[1]
    1CK——Referenced as a related Temescal SuperSource model rated up to 8 kW.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org