Tool family
The SUSS MicroTec MA1006 is listed as an equipment option for step height profilometer training or service.
The SUSS MicroTec MA1006 is a manual mask aligner for top and bottom side alignment with exposure programmes for proximity, soft, hard and vacuum contact, suitable for wafers up to 150mm diameter.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| MA1006 TSA | — | — | Top Side Alignment variant | nanofab.utah.edu[1] |
| MA1006 TSAIBSA | — | — | Top and Bottom Side Alignment variant | nanofab.utah.edu[1] |
| MA1006 TSAII R | — | — | Variant designation as stated in manual | nanofab.utah.edu[1] |
| MA1006 TSA / BSA | — | — | Top and bottom side alignment configuration | nanofab.utah.edu[2] |