SUSS MicroTec MA 150

Models in this family

1. 

   MA 150

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   MA150	—	—	—	web.archive.org[1]
   MA150CC	—	—	—	web.archive.org[1]
   MA150e	—	—	—	web.archive.org[1]
   MA150M	—	—	—	web.archive.org[1]

2. 

   MA 150 CC Mask

   The SUSS MA 150 CC Mask Aligner is a mask aligner with cassette-to-cassette operation and wafer sizes from 2 to 6 inches.

3. MA 150 E

   The SUSS MA 150 E is a 6-inch (150 mm) automatic mask aligner configured with wafer thickness measurement and alignment accessories.

4. 

   MA 150 E Mask

   The SUSS MA 150 E Mask Aligner is a 6-inch mask aligner configured with wafer thickness measurement and related alignment accessories.

5. 

   MA 150 M EL MA Mask

   The SUSS MA 150 M EL MA is a mask aligner for 6-inch wafers.

6. 

   MA 150 Mask

Sources