Tool family
The Santa Clara Plastics SCP 8500 is a batch wafer processing system described as an 8-inch Piranha Clean unit.
The Santa Clara Plastics SCP 9400 is a batch wafer processing system described as an 8-inch RCA clean tool.
The Santa Clara Plastics SCP E 200 is a batch wafer processing system for 8-inch wafers, configured for etching and stripping processes.
The Santa Clara Plastics SCP 8500 is a batch wafer processing system described as an 8-inch Piranha Clean unit.
The Santa Clara Plastics SCP 9400 is a batch wafer processing system described as an 8-inch RCA clean tool.
The Santa Clara Plastics SCP E 200 is a batch wafer processing system for 8-inch wafers, configured for etching and stripping processes.