Waferpedia

Tool family

Pfeiffer Duo 3 Vacuum

Pfeiffer1 entry

Models in this family

  1. Cited variants

    DesignationGenerationVintageChangesSource
    Duo 3——Standard versionpfeiffervacuum.com[1]
    Duo 3 M——Differs from the standard version by magnetic couplingpfeiffervacuum.com[1]
    Duo 3 MC——Differs from the standard version by operating fluid F4, magnetic coupling encapsulated on the pump side, changed vane material, hose connection on the gas ballast valve, and leakage rate ≤ 1 × 10-8 Pa m3/spfeiffervacuum.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]pfeiffervacuum.compfeiffervacuum.com