Waferpedia

Tool family

Oxford Instruments PECVD4

Oxford InstrumentsDeposition1 entry

Oxford Instruments PECVD4 is identified as an Oxford Plasmalab System 100 PECVD system in the NanoLab equipment listings.

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Models in this family

  1. PECVD4

    Cited variants

    DesignationGenerationVintageChangesSource
    Oxford PECVD4 - SiOx——SiOx process specificationnanolab.berkeley.edu[1]
    Oxford PECVD4 - SixNy——SixNy process specificationnanolab.berkeley.edu[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]nanolab.berkeley.edunanolab.berkeley.edu