Tool family
The Nikon R10 is a 1986 i-line stepper for 150 mm wafers used in semiconductor lithography.
The Nikon R10 is a 1986 i-line stepper for 150 mm wafers used in semiconductor lithography.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| Nikon R8 SUPER ZOOM | — | 1973 | Successor to the conventional 8X SUPER ZOOM, with a 7.5~60 mm F1.8 (9-group 13-element) zoom lens; released at the same time as the R10 SUPER ZOOM and less expensive. | imaging.nikon.com[1] |