Nikon NSR S 204

Models in this family

1. NSR S 204

   The Nikon NSR S 204 is a lithography scanner manufactured by Nikon that supports 8-inch wafers.

2. 

   NSR S 204 B

   The Nikon NSR S 204 B is a scanner for 8-inch wafer photolithography. (Source 1: "Process: Photolithography", "Wafer Sizes: 8 inch")

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   Scanner	—	2001	Listed with software version MCSV, CIM SECS, handler system WL Type 3, factory interface Open Cassette, and Cymer ELS 6400 laser.	Equipment inventory listing[1]
   Stepper / Scanner	—	2001	Listed with WL size 200MM, reticle size 6", RL type Standard (no smif), NEMA box 3P 200V, chamber Sendai, lens type 4EN2GK, and Cymer ELS 6400 laser.	Equipment inventory listing[2]

3. 

   NSR S 204 B Step and Repeat

   The Nikon NSR S 204 B is a step-and-repeat lithography system, manufactured around the year 2000.

Sources