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Tool family

MKS Vision 2000-A

MKS1 entry

The MKS Vision 2000-A is a residual gas analyzer for ALD and CVD processes with extreme sensitivity (minimum detectable partial pressure <2.7e-10 Pa) and a modular all-metal inlet.

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Models in this family

  1. Vision 2000-A

    The MKS Vision 2000-A is a residual gas analyzer for ALD and CVD processes with extreme sensitivity (minimum detectable partial pressure <2.7e-10 Pa) and a modular all-metal inlet.