Waferpedia

Tool family

Leybold Turbovac 1000 C Turbomolecular Vacuum

Leybold1 entry

Leybold Turbovac 1000 C Turbomolecular Vacuum Pump.

Models in this family

  1. The Leybold Turbovac 1000 C is a turbomolecular vacuum pump with a pumping speed of 1000 L/s for N2.