Waferpedia

Tool family

Leybold D 40 B

Leybold1 entry

Models in this family

  1. The Leybold TRIVAC D 40 B is an oil-sealed, dual-stage rotary vane vacuum pump with nominal and effective pumping speeds of 46 m3/h and 40 m3/h, an ultimate total pressure below 2 x 10-3 mbar without gas ballast, and a water vapor capacity of 1184 g/h.

    Cited variants

    DesignationGenerationVintageChangesSource
    TRIVAC D 40 BCS——Corrosive PFPE (perfluoropolyether) application version of the D 40 B; Leybold part number 11388.ajvs.com[1]
    TRIVAC D 40 B ATEX Category 3 i/3o versions——ATEX Category 3 i and 3 i/o versions with mineral oil; catalog numbers 140180 and 140190 with motor type EeDA 100L/4A rated 2600 W at 50 Hz.ajvs.com[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]ajvs.comajvs.com
  2. [2]ajvs.comajvs.com