Waferpedia

Tool family

Laurell WS-650-23B

LaurellResist Processing1 entry

Laurell WS-650-23B is a 650 Series spin coater with a maximum substrate size of ø150mm (5" × 5") and a maximum speed of 12,000 rpm.

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Models in this family

  1. WS-650-23B

    Laurell WS-650-23B is a 650 Series spin coater with a maximum substrate size of ø150mm (5" × 5") and a maximum speed of 12,000 rpm.