Waferpedia

Tool family

Laurell EDC-650-23 B

LaurellResist Processing1 entry

The Laurell EDC-650-23 B is an EDC System 650-series spin coater with a maximum substrate size of ø 150mm (5" × 5") and a maximum speed of 12000 rpm.

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Models in this family

  1. EDC-650-23 B

    The Laurell EDC-650-23 B is an EDC System 650-series spin coater with a maximum substrate size of ø 150mm (5" × 5") and a maximum speed of 12000 rpm.