Lam Research's SPEED product family is a series of High-Density Plasma Chemical Vapor Deposition (HDP-CVD) systems used for dielectric gapfill in semiconductor manufacturing.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|
| SPEED NExT | — | — | — | lamresearch.com[1] |
| SPEED Max | — | — | — | lamresearch.com[1] |