Waferpedia

Tool family

Lam Research Rainbow 4720

Lam ResearchEtch1 entry

Models in this family

  1. The Lam Research Rainbow 4720 is a semiconductor etch tool that supports 8-inch (200mm) wafers.

    Cited variants

    DesignationGenerationVintageChangesSource
    Rainbow 4720 Dry——Dry etch variantwaferpedia.com[1]
    Rainbow 4720 Metal Etch——Metal etch variantsemistarcorp.com[2]

Sources

Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]semistarcorp.comsemistarcorp.com