Lam Research Gasonics Vector

Models in this family

1. 

   Gasonics Vector

   The Lam Research Gasonics Vector is a deposition system used in semiconductor manufacturing, specifically designed for chemical vapor deposition (CVD) processes.

2. Gasonics Vector Express

   The Lam / Novellus / Gasonics Vector Express is a PECVD system stated to be configured for 12-inch wafers.

3. 

   Gasonics Vector Extreme

   The Lam / Novellus / Gasonics Vector Extreme is a PECVD system described with 12-inch wafer size and a range of process, gas box, and front-end options.

4. Gasonics Vector SOLA

   The Lam / Novellus / Gasonics Vector SOLA is a plasma-enhanced chemical vapor deposition (PECVD) system that processes 12-inch wafers and includes a UV cure capability.