The Lam Research 2300 Versys Kiyo is a plasma etch system for processing 300 mm wafers, designed for etching polysilicon films and part of the 2300 series.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|
| 2300 V2 | — | — | 3 load ports, 4 Kiyo CX chambers, ATM and VTM robots, software SP15-HF6 | waferpedia.com[1] |
| 2300 Versys Kiyo 45 | — | — | Conductor etch variant for 300mm lines | globaltechsolutions.com.sg[2] |