KLA Surfscan 6400

Models in this family

1. Surfscan 6400

   The KLA Surfscan 6400 is an unpatterned bare-wafer surface defect and particle inspection system.

2. 

   Surfscan 6400 Film Surface Analysis

   The KLA Surfscan 6400 Film Surface Analysis is a metrology and inspection system for film surface analysis, supporting 200mm wafers.

3. 

   Surfscan 6400 Particle Defect
4. Surfscan 6400 Refurbishment Services

   KLA Surfscan 6400 Refurbishment Services is a refurbishment-only offering for a client system.