Tool family
The KLA / Filmetrics F 20 UV is a thin film measurement system.
KLA / Filmetrics F 5 X is a film thickness measurement equipment model.
The KLA / Filmetrics F 50 is a thin film thickness mapper.
Cited variants
| Designation | Generation | Vintage | Changes | Source |
|---|---|---|---|---|
| 205-0881 | — | — | — | Equipment inventory listing[1] |
The KLA / Filmetrics F 60 C XT is a film thickness measurement system.
The KLA / Filmetrics F 20 UV is a thin film measurement system.
KLA / Filmetrics F 5 X is a film thickness measurement equipment model.
The KLA / Filmetrics F 50 is a thin film thickness mapper.
The KLA / Filmetrics F 60 C XT is a film thickness measurement system.