Waferpedia

Tool family

KLA F

KLA5 entries

Models in this family

  1. The KLA / Filmetrics F 20 UV is a thin film measurement system.

  2. KLA / Filmetrics F 5 X is a film thickness measurement equipment model.

  3. The KLA / Filmetrics F 50 is a thin film thickness mapper.

    Cited variants

    DesignationGenerationVintageChangesSource
    205-0881———Equipment inventory listing[1]
  4. The KLA / Filmetrics F 60 C XT is a film thickness measurement system.

All entries

  1. F 10 RT UV Thin Film AnalyzerKLA
    2 specs
  2. F 20 UV Thin Film MeasurementKLA

    The KLA / Filmetrics F 20 UV is a thin film measurement system.

    5 specs
  3. F 5 X Film Thickness MeasurementKLA

    KLA / Filmetrics F 5 X is a film thickness measurement equipment model.

    CategoryMetrology & Inspection
    7 specs
  4. F 50 Thin Film Thickness MapperKLA

    The KLA / Filmetrics F 50 is a thin film thickness mapper.

    20 specs
  5. F 60 C XT Film Thickness MeasurementKLA

    The KLA / Filmetrics F 60 C XT is a film thickness measurement system.

    CategoryMetrology & Inspection
    5 specs

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing