Waferpedia

Tool family

EV Group 6200 NT

Models in this family

  1. The EVG 6200 NT is a mask alignment system for optical lithography with wafer sizes up to 200 mm.

    Cited variants

    DesignationGenerationVintageChangesSource
    EVG6200 NT Gen2——Fully-housed variant mentioned alongside semi-automated and automated configurations.evgroup.com[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]evgroup.comevgroup.com