Tool family
EV Group 6200
Models in this family
The EVG 6200 Mask Aligner is a lithography tool configured for 6-inch and 8-inch wafers.
The EVG 6200 NT is a semi automated bottom side alignment system with double-side operation and manual handling.
All entries
- 6200EV GroupCategoryLithography
- 6200 MaskEV Group
The EVG 6200 Mask Aligner is a lithography tool configured for 6-inch and 8-inch wafers.
CategoryLithography14 specs - 6200 NT Semi Automated Bottom Side AlignmentEV Group
The EVG 6200 NT is a semi automated bottom side alignment system with double-side operation and manual handling.
CategoryLithography23 specs