Waferpedia

Tool family

EV Group 310

EV Group1 entry

The EV Group 310 is a single-wafer cleaner with a megasonic DI water cleaning module and a pre-bond station with infrared lamp imaging.

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Models in this family

  1. 310

    The EV Group 310 is a single-wafer cleaner with a megasonic DI water cleaning module and a pre-bond station with infrared lamp imaging.