Waferpedia

Tool family

ESPEC TSD-101-W

ESPEC1 entry

The ESPEC TSD-101-W is a thermal shock chamber listed by ESPEC as the next larger model after the TSE-12-A.

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Models in this family

  1. TSD-101-W

    The ESPEC TSD-101-W is a thermal shock chamber listed by ESPEC as the next larger model after the TSE-12-A.