Tool family
The CHA Mark 50 is a physical vapor deposition (PVD) system for thin-film deposition, capable of handling 6-inch wafers.
The CHA Mark 50 is an electron-beam evaporator used for thin film deposition.
The CHA Mark 50 Vacuum Evaporator is a vacuum evaporator with 3 phase, 208 VAC, 60 Hz, and 175 amps specified.
The CHA Mark 50 is a physical vapor deposition (PVD) system for thin-film deposition, capable of handling 6-inch wafers.
The CHA Mark 50 is an electron-beam evaporator used for thin film deposition.
The CHA Mark 50 Vacuum Evaporator is a vacuum evaporator with 3 phase, 208 VAC, 60 Hz, and 175 amps specified.