Canon FPA 5500 iZa

Models in this family

1. FPA 5500 iZa

   The Canon FPA 5500 iZa is a lithography scanner/stepper platform with an i-line source at 365 nm and support for 300 mm wafers.

   Cited variants

   Designation	Generation	Vintage	Changes	Source
   FPA 5500 iZa i-Line	i-line	—	Described as an i-line stepper lithography system for 8-inch wafers.	waferpedia.com[1]

Sources