Waferpedia

Tool family

Axcelis GSD

AxcelisIon Implantation2 entries
LinkedIn X Email

Models in this family

  1. GSD 01 X
  2. GSD 100

    The Axcelis GSD 100 is a high-current ion implanter configured as a GSD 200 E type for 6-inch wafer processing.

All entries

  1. GSD 01 XAxcelis
    2 specs
  2. GSD 100Axcelis

    The Axcelis GSD 100 is a high-current ion implanter configured as a GSD 200 E type for 6-inch wafer processing.

    CategoryIon ImplantationWaferNo wafer top-side bar reading
    62 specs