Waferpedia

Tool family

AJA A3CV

AJADeposition1 entry

The AJA A3CV is a magnetron sputtering source line with a common source head subassembly that accepts multiple target modules and is offered in HV and UHV mounting versions.

Models in this family

  1. The AJA A3CV is a magnetron sputtering source line with a common source head subassembly that accepts multiple target modules and is offered in HV and UHV mounting versions.

    Cited variants

    DesignationGenerationVintageChangesSource
    A3CV series——Available in HV and UHV mounting versions; optional gas injection chimneys, source head tilt gimbals, integral shutters, and power supplies are mentioned.web.archive.org[1]
    2" version——Shown as a source variation with manual tilt and gas injection chimney.web.archive.org[1]
    2.5" version——Shown on a 6" CF flange with gas injection chimney.web.archive.org[1]
    3" magnetic material version——Shown as a magnetic material version.web.archive.org[1]
    2" module——Shown as a source variation.web.archive.org[1]
    magnetic version core——Shown as a source variation.web.archive.org[1]
    magnetic version module——Shown as a source variation.web.archive.org[1]
    2 in version——Shown as a source variation with manual tilt and gas injection chimney.web.archive.org[1]
    2.5 in version——Shown on a 6 in CF flange with gas injection chimney.web.archive.org[1]
    3 in magnetic material version——Shown as a magnetic material version.web.archive.org[1]
    2 in module——Shown as a module variation.web.archive.org[1]

Sources

Sources (1)Every fact above is drawn from these public sources
  1. [1]web.archive.orgweb.archive.org