Comparison ledger
Zeiss Supra 55, Zeiss Supra 55 VP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Supra 55Zeiss | Supra 55 VPZeiss |
|---|---|---|
| OEM | Zeiss | Zeiss |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Zeiss Supra 55 | Zeiss Supra 55 |
| Cited variants | — | |
| Specifications | ||
| Configuration | Detectors:[3] | Variable pressure[6] |
| Electron Source Type | Schottky thermal field emission source (FESEM)[2] | — |
| Accelerating Voltage | 0.2 to 30 kV[4] | — |
| Accelerating Voltage (VP variant) | 0.1 to 30 kV[5] | — |
| Imaging Resolution (High Vacuum, 15 kV) | 1.0 nm[5] | — |
| Imaging Resolution (High Vacuum, 1 kV) | 1.7 nm[5] | — |
| Imaging Resolution (High Vacuum, 0.2 kV) | 3.5 nm[5] | — |
| Imaging Resolution (VP mode, 30 kV) | 2.0 nm[5] | — |
| Resolution (general range) | 2 nm[2] | — |
| Magnification Range | 12 - 900,000x[5] | — |
| Probe Current | 4 pA to 10 nA (20 nA optional)[5] | — |
| Variable Pressure Range | 2 to 133 Pa, adjustable in steps of 1 Pa[5] | — |
| Detectors | InLens SE, E-T (SE2), AsB (backscattered), CL (cathodoluminescence), STEM, EDS, EBSD[3] | In-lens detector, Everhart-Thornley detector, secondary detector, VP-SE detector, and 4-quadrant backscattered electron detector[7] |
| Sample Stage | 5-Axes (X, Y, Z, R, T) Motorized Cartesian[5] | — |
| Operating System | Windows 7 32-bit with Smartsem v5.05[3] | — |
| Load-Lock System | FJELD Airlock[3] | — |
| Pumps | Adixen rough pump (airlock), Edwards RV12 oil rough pump (chamber)[3] | — |
| Chiller | ATC Chiller[3] | — |
| Model | Supra 55[3] | — |
| Equipment type | Scanning Electron Microscope (SEM)[3] | — |
| Source type | FESEM[2] | — |
| Electron source | Schottky thermal field emission source[2] | — |
| Electron image resolution | 1.0 nm (@ 15 kV), 1.7 nm (@ 1 kV), 3.5 nm (@ 0.2 kV), 2.0 nm (@ 30 kV in VP mode)[5] | 1.0 nm at 15 kV; 1.7 nm at 1 kV; 3.5 nm at 0.2 kV; 2.0 nm at 30 kV in VP mode[5] |
| Magnification | 12 - 900,000x[5] | 12 to 900,000x[5] |
| Variable pressure range | 2 - 133 Pa, adjustable in steps of 1 Pa[5] | 2 to 133 Pa[5] |
| Acceleration voltage | 0.1 - 30 kV[5] | — |
| Probe current | 4 pA - 10 nA (20 nA optional)[5] | 4 pA to 10 nA[5] |
| Accessory | FJELD Airlock[3] | — |
| Windows OS | — | W10[6] |
| Software | — | SmartSEM (v6)[6] |
| Source Type | — | TFE[6] |
| Primary pump | — | turbo[6] |
| Instrument type | — | Field emission scanning electron microscope (FE-SEM)[5] |
| Operating modes | — | High vacuum and variable pressure[5] |
| Field emission cathode | — | Present[7] |
| Accelerating voltage range | — | 100 V to 30 kV[7] |
| Sample stage | — | 5-axes motorized Cartesian sample stage[5] |
| Probe current optional upper limit | — | 20 nA optional[5] |
| Accessories | — | EDS detector, EBSD[5] |
| Control system OS | — | Windows 10[6] |
| Secondary electron detector | — | Everhart-Thornley secondary electron detector[6] |
| In-lens detector | — | Present[6] |
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