Comparison ledger
YES 10TA, YES 8TA, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 10TAYES | 8TAYES |
|---|---|---|
| OEM | YES | YES |
| Category | Dual function VB/VP & image reversal system | Dual function VB/VP & image reversal system |
| Wafer size | 4 in. wafers; 5-8 in. wafers | 5-6 in. wafers; 8 in. wafers; 12 in. wafers |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | YES 10TA | YES 8TA |
| Specifications | ||
| Capacity | 8 cassettes of 4 in. wafers, or 1 cassette of 5-8 in. wafers[1] | 8 cassettes of 5-6 in. wafers, or 2 cassettes of 8 in. wafers, or 1 cassette of 12 in. wafers[1] |
| Cleanliness | <10x1 micron particles per 4 in. wafer[1] | < 5 x 1 micron particles per 6-in. wafer[1] |
| Throughput | (2) 1/2 loads/hr.[1] | 2 full loads/hr.[1] |
| Maximum temperature | 160°C max (image reversal process 90°C)[1] | — |
| Temperature | 160°C max (image reversal process 90°C)[1] | 160°C max[1] |
| Function | — | Dual function VB/VP & image reversal[2] |
| HMDS usage | — | <5 ml/200 wafers (75 prime cycles/pint)[1] |
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