Comparison ledger
Varian 0332 F 9453 302 Diffusion, YES 5TA, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 5TAYES | |
|---|---|---|
| OEM | Varian | YES |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | 4-inch wafers; 5-6-inch wafers; 8-inch wafers; 12-inch wafers |
| Process node | — | — |
| Introduced | — | 1980 |
| Production run | — | 1980– |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Varian 0332 F 9453 302 Diffusion | YES 5TA |
| Specifications | ||
| Asset Number | 142841[1] | — |
| Last Confirm Date | October 14, 2025[2] | — |
| capacity | — | 8 cassettes of 5-6 in. wafers, or 2 cassettes of 8 in. wafers, or 1 cassette of 12 in. wafers[3] |
| cleanliness | — | < 5x1 micron particles per 6-in. wafer[3] |
| throughput | — | 2 full loads/hr.[3] |
| HMDS usage | — | < 5 ml/200 wafers (75 prime cycles/pint)[3] |
| temperature | — | 160°C max[3] |
| chamber dimensions | — | 16-in (406mm) high x 16-in (406mm) wide x 18-in (406mm) deep[4] |
| system dimensions | — | 31.75-in (806mm) high x 27.75-in (705mm) wide x 23-in (584mm) deep[4] |
| weight | — | 245 pounds stand-alone; 400 pounds international shipping (includes crate)[4] |
| power | — | System Vacuum Pump: 115V, 60Hz, 1 Phase, 7A or 220V, 50Hz, 1 Phase, 3.5A[4] |
| Capacity (Vapor Prime, 5-6 inch wafers) | — | 8 cassettes of 5 or 6-inch wafers[4] |
| Capacity (Vapor Prime, 4-inch wafers) | — | 12 cassettes of 4-inch wafers[4] |
| Capacity (8-inch wafers) | — | 2 cassettes of 8-inch wafers[3] |
| Capacity (12-inch wafers) | — | 1 cassette of 12-inch wafers[3] |
| Cleanliness (6-inch wafer) | — | less than 5x1-micron particles per 6-inch wafer[4] |
| HMDS Usage (50 cycles/pint) | — | < 5ml/200 wafers (75 prime cycles/pint)[4] |
| Temperature Stability | — | 160°C max ± 2°C[4] |
| Chamber Dimensions | — | 16-in (406mm) High, 16-in (406mm) Wide, 18-in (406mm) Deep[4] |
| System Dimensions | — | 31.75-in (806mm) High, 27.75-in (705mm) Wide, 23-in (584mm) Deep[4] |
| Weight (Stand-Alone) | — | 245 pounds[4] |
| Weight (International Shipping, Includes Crate) | — | 400 pounds[4] |
| Power: System (115V, 60Hz, 1 Phase) | — | 14A[4] |
| Power: System (220V, 50Hz, 1 Phase) | — | 7A[4] |
| Power: Vacuum Pump (115V, 60Hz, 1 Phase) | — | 7A[4] |
| Power: Vacuum Pump (220V, 50Hz, 1 Phase) | — | 3.5A[4] |
Plan your fab
Building a Thermal / Diffusion process? Get a complete equipment list.
Open the fab equipment planner →