Comparison ledger
Temescal 2CK, Temescal 3CK, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2CKTemescal | 3CKTemescal |
|---|---|---|
| OEM | Temescal | Temescal |
| Category | E-gun | E-gun |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Temescal 2CK | Temescal 3CK |
| Cited variants | ||
| Specifications | ||
| Model | 2CK SuperSource[1] | 3CK SuperSource[1] |
| Rated power | up to 10 kW[1] | Up to 12 kW[1] |
| Crucible cover | Removable cover[1] | Removable crucible cover[1] |
| Drive options | Side or bottom drive[1] | Side drive or bottom drive[1] |
| Deflection | 270°[1] | 270 degrees[1] |
| Weight | 23.5 lbs (10.7 kg)[1] | 23.5 lbs. (10.7 kg)[1] |
| Max bakeout temperature | 302 °F (150 °C)[1] | 302 F (150 C)[1] |
| Acceleration voltage | 4–10 kV[1] | 4-10 kV[1] |
| Operating pressure | Maximum 5 × 10^-4 torr (6.7 × 10^-4 mbar); minimum 1 × 10^-4 torr (1.33 × 10^-4 mbar)[1] | — |
| Filament current | 70 A at 12 V ac[1] | 70 A at 12 V ac[1] |
| Emission current | 0–1.5 A at 4–10 kV dc (8 kW max.)[1] | 0-1.5 A at 4-10 kV dc (8 kW max.)[1] |
| Cooling water maximum temperature | 68 °F (20 °C)[1] | — |
| Cooling water flow rate | 2.75 gpm (0.17 l/sec.)[1] | — |
| Cooling water max inlet pressure | 100 psi (6.89 bar)[1] | — |
| Cooling water min delta pressure | 50 psi (3.45 bar)[1] | — |
| High-voltage feedthroughs | Two HV feedthroughs rated for 12 kV at 70 A[1] | — |
| Octal feedthrough | One octal feedthrough rated for 110 V at 3 A per lead[1] | — |
| Dual-pass feedthrough | One dual-pass feedthrough with 3/8-in. (9.5-mm) OD tubes[1] | — |
| Rotary feedthrough | One rotary-motion feedthrough with 1/4-in. (6.4-mm) diameter shaft[1] | — |
| Type | — | Electron beam deposition source / e-gun[1] |
| Crucible configurations stated for 3CK | — | 4 x 40cc; 4 x 60cc; 6 x 20cc; 6 x 25cc; 4 x 25cc + 2 x 15cc; 5 x 25cc + 1 x 15cc; 325 cc skillet[1] |
| Dimensions | — | See illustration[1] |
| Rotation torque | — | 10 in.-lbs. (11.5 kg-cm)[1] |
| Max power | — | 8 kW[1] |
| Operating pressure maximum | — | 5 x 10^-4 torr (6.7 x 10^-4 mbar)[1] |
| Operating pressure minimum | — | 1 x 10^-4 torr (1.33 x 10^-4 mbar)[1] |
| Spot size/shape | — | From tight oval to diffuse oblong[1] |
| Evaporation rate example | — | 25 kA of aluminum at 10-in. (254-mm) source-to-substrate distance[1] |
| Sweep capability | — | Longitudinal and lateral when operated with a beam sweep controller[1] |
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