Comparison ledger
Tegal 1512e, Tegal 6500, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1512eTegal | 6500Tegal |
|---|---|---|
| OEM | Tegal | Tegal |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Tegal 1512e | Tegal 6500 |
| Specifications | ||
| Tool type | Industrial RIE plasma etcher system[1] | — |
| Stated configuration | With modules assembly for CI-4222[1] | — |
| Configuration | — | 2 Chamber Nitride Etch[2] |
| OS | — | JDOS[2] |
| Missing | — | pumps, unknown[2] |
| Number of chambers | — | 2[2] |
| Etch type | — | Nitride[2] |
| Operating system | — | JDOS[2] |
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