Comparison ledger
SUSS MicroTec RC 8 MS 3 Spin, Thermo Fisher 1300 Series Safety, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | RC 8 MS 3 SpinSUSS MicroTec | 1300 Series SafetyThermo Fisher |
|---|---|---|
| OEM | SUSS MicroTec | Thermo Fisher |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2026 Third-party support only |
| Control system | — | — |
| Generation | — | — |
| Family | SUSS MicroTec RC 8 MS 3 Spin | Thermo Fisher 1300 |
| Specifications | ||
| Frequency | 50 Hz[1] | — |
| Voltage | 220 V[1] | — |
| Configuration | With controller[1] | Class II[3] |
| Does not include add-ons (ex | edge bead removal / dispense and autoclean)[1] | — |
| Type | Spin coater[1] | — |
| Vintage | 2001[2] | — |
| Controller | With controller[1] | — |
| High Gyrset | 3, 5 and 8[2] | — |
| Air | 4-9 bar[2] | — |
| Vacuum | -0.6 bar[2] | — |
| Cabinet type | — | Class II, Type A2 biological safety cabinet[4] |
| Airflow compensation | — | SmartFlow airflow compensation system[4] |
| Motors | — | Dual DC motors[4] |
| Front window design | — | SmartClean front window design[4] |
| Control panel | — | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[4] |
| UV light | — | Programmable UV light[4] |
| SmartPort | — | SmartPort convenience for routing tubing and cables through the side walls[4] |
| Available widths | — | 3-foot, 4-foot, 5-foot, and 6-foot sizes[4] |
| Front opening choices | — | 8-inch or 10-inch front opening[4] |
| Filter specification | — | H14 HEPA filters, EN 1822, 99.995% @ MPPS[5] |
| Certification | — | NSF/ANSI 49, UL, CE[5] |
| Service valves | — | Up to 6 total, 3 on each side wall[5] |
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