Comparison ledger
SCREEN SU 3200 Single Wafer, Thermo Fisher 1300 Series Safety, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SU 3200 Single WaferSCREEN | 1300 Series SafetyThermo Fisher |
|---|---|---|
| OEM | SCREEN | Thermo Fisher |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 2026 Third-party support only |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN SU 3200 Single Wafer | Thermo Fisher 1300 |
| Specifications | ||
| Type | single-wafer cleaner[1] | — |
| Wafer size | 12 inch[2] | — |
| Expandable chambers | up to 12 chambers[1] | — |
| Throughput | up to 800 wafers per hour[1] | — |
| Process compatibility | compatible with processes for 28 nm node and lower[3] | — |
| Make | SCREEN / DNS[2] | — |
| Model | SU 3200[2] | — |
| Tool type | Single Wafer Cleaner[1] | — |
| Maximum throughput | up to 800 wafers per hour[1] | — |
| Maximum chambers | up to 12 chambers[1] | — |
| Chamber arrangement | 12 chambers in four three-level towers[1] | — |
| Chemical supply system | dynamic direct injection (DDI) or cabinet-type chemical supply system[1] | — |
| Communication protocol | SECS/GEMS[4] | — |
| Wafer handler | Kawasaki robot[4] | — |
| System power rating | 208AC-3 Phase[4] | — |
| Software version | P2485STD00V2485STD00[4] | — |
| Configuration | — | Class II[5] |
| Cabinet type | — | Class II, Type A2 biological safety cabinet[6] |
| Airflow compensation | — | SmartFlow airflow compensation system[6] |
| Motors | — | Dual DC motors[6] |
| Front window design | — | SmartClean front window design[6] |
| Control panel | — | Intuitive control panel with constant readout of downflow and inflow velocities and filter reserve status[6] |
| UV light | — | Programmable UV light[6] |
| SmartPort | — | SmartPort convenience for routing tubing and cables through the side walls[6] |
| Available widths | — | 3-foot, 4-foot, 5-foot, and 6-foot sizes[6] |
| Front opening choices | — | 8-inch or 10-inch front opening[6] |
| Filter specification | — | H14 HEPA filters, EN 1822, 99.995% @ MPPS[7] |
| Certification | — | NSF/ANSI 49, UL, CE[7] |
| Service valves | — | Up to 6 total, 3 on each side wall[7] |
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