Comparison ledger
SCREEN SU 3000, YES 1000FP, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | SU 3000SCREEN | 1000FPYES |
|---|---|---|
| OEM | SCREEN | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | SCREEN SU 3000 | YES 1000FP |
| Cited variants | — | |
| Specifications | ||
| Configuration | SR Type, SST, 3 Load Port, include HDD[1] | — |
| Wafer Size | 12 inch[1] | — |
| Type | SR Type[1] | — |
| Chemistry | DHF[2] | — |
| Load Ports | 3[1] | — |
| HDD Included | Yes[1] | — |
| Vintage (example) | 2004[1] | — |
| Process Chemistry | 2 AM 1/2 DHF[5] | — |
| Phase | 3 Phase[6] | — |
| Frequency | 60 Hz[6] | — |
| Voltage | 200 VAC[6] | — |
| Full Load | 27 kVA, 78 A[6] | — |
| Equipment type | Cleaner[1] | — |
| Vintage | 2004[1] | — |
| System type | — | Plasma cleaning system[8] |
| Line | — | R-Series Plasma Cleaning Systems (Glen Technologies)[8] |
| Model | — | Glen/YES 1000FP[8] |
| Designed use | — | Designed to accept a range of shelf sizes[8] |
| Application focus | — | Changing needs of the flat panel industry[8] |
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