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Comparison ledger

SS 3100versus11600 SRD

SCREEN SS 3100, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
SS 3100SCREEN
11600 SRDSemitool
OEMSCREENSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilySCREEN SS 3100Semitool 11600 SRD
Specifications
ManufacturerSCREEN / DNS[1]Semitool[4]
ModelSS 3100[1]11600 SRD[4]
Equipment typeScrubber[1]Spin Rinse Dryer[4]
Equipment categoryWet Processing / Clean[2]—
Example unit vintage2009[3]—
Configuration—Ceramic[4]
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Sources (4)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]inventory listing